Role in HaloFreeEtch:
TUC leads the HaloFreeEtch project, overseeing the overall management, coordination, and execution of project activities. With its strong expertise in semiconductor technologies and advanced materials, TUC plays a crucial role in developing the innovative halogen-free etching processes and ensuring their integration into existing manufacturing workflows.
Role in HaloFreeEtch:
PLASMASOLVE is responsible for advancing plasma-based etching technologies within the project. Their expertise in plasma processes is vital for creating environmentally friendly etching solutions that can replace traditional halogenated compounds. PS also contributes to the scaling up and industrial validation of these new technologies.
Role in HaloFreeEtch:
VUB brings its extensive research capabilities to the HaloFreeEtch project, focusing on fundamental studies of the new etching processes. Their work includes investigating the underlying mechanisms, optimizing process parameters, and ensuring that the new methods meet high-performance standards.
Role in HaloFreeEtch:
Fraunhofer supports the project by conducting applied research and providing industrial-scale testing facilities. Their involvement ensures that the new etching technologies are not only theoretically sound but also practical and effective in real-world manufacturing environments.
Role in HaloFreeEtch:
The Department of Environmental Systems Sciences, University of Graz, contributes to the HaloFreeEtch project by leveraging its expertise in sustainability research. Their team specializes in industrial sustainability assessment and the development of integrated decision-support systems for early stages of process and product design. By focusing on life cycle assessments of novel etching techniques, they will help quantify the environmental impacts of these technologies, thereby enabling the project to align innovation with circularity and sustainability.
Role in HaloFreeEtch:
Tinexta Innovation Hub has been active since 1995, growing over the years to become a leader in its sector today. Tinexta Innovation Hub gives its clients the best support tools for the success of their business initiatives and to assist them in the preparation and management of strategic projects: business projects, research projects, training and technology transfer activities, under National and International support frameworks. The European Funding Development (EFD) team provides consultancy, training, and support on EU-funding opportunities, and in the preparation, negotiation and management of European proposals, particularly on H2020/Horizon Europe calls.
Role in HaloFreeEtch:
LNX focuses on the practical implementation and commercialization of the project’s innovations. Their role includes integrating the new etching processes into semiconductor manufacturing lines and demonstrating their feasibility and advantages in an industrial context.