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PublicationsSara Attanà2024-12-11T15:47:58+01:00

09/11/2024 | ORF | Umweltfreundliche Halbleiterproduktion

Project Details

Project number: 101161153
Project name: Novel approaches for halogen-free and sustainable etching of Silicon and Glass
Project acronym: HaloFreeEtch
Topic: HORIZON-EIC-2023-PATHFINDERCHALLENGES-01-04
Type of action: HORIZON-EIC
Project starting date: 1 September 2024
Project duration: 48 months
EU Contribution: 3.997.735,00 Euro

“Funded by the European Union. Views and opinions expressed are however those of the author(s) only and do not necessarily reflect those of European Innovation Council and SMEs Executive Agency (EISMEA). Neither the European Union nor the granting authority can be held responsible for them.”

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